Design and Construction of a Sample Holder and Heater Apparatus for Thin Film Stress Measurements.

Simple item page
dc.contributor.authorSilvernail, Adam
dc.date.accessioned2011-09-23T18:50:15Z
dc.date.available2011-09-23T18:50:15Z
dc.date.issued2011-09-23
dc.description.abstractThin film stress may be characterized through curvature measurements due to film strain. One way to change and control film stress is through a change in temperature while the film and substrate have varying coefficients of thermal expansion. To control the temperature of the film/substrate system, a sample holder and heater have been constructed for the Houghton College deposition chamber. Samples will be heated while under vacuum while measuring the resulting change in film/substrate curvature as a function of temperature for various materials, such as silver and titanium, using an interferometer. Film stress may be calculated directly from the film curvature using appropriate models such as the Stoney formula. Various models for relating curvature and stress will be discussed, as well as a description of the Houghton College deposition apparatus.
dc.identifier.urihttps://dspace.houghton.edu/handle/hc/3750
dc.publisherHoughton College
dc.rightsAuthors retain the copyright for all content posted in this repository. This material may not be published, reproduced, broadcast, rewritten, or redistributed beyond the Houghton College community without permission except in accordance with fair use doctrine.
dc.subjectStudent Projects
dc.titleDesign and Construction of a Sample Holder and Heater Apparatus for Thin Film Stress Measurements.
Files
Original bundle
Now showing 1 - 1 of 1
Thumbnail Image
Name:
Adam-Silvernail_2011.pdf
Size:
1.94 MB
Format:
Adobe Portable Document Format
Description:
Download
Collections
Physics: Theses