The Design and Construction of a Deposition Chamber, Laser Interferometer for the Study of Thin Metal Films

Abstract

A deposition chamber and a laser interferometer are currently under development at Houghton College. The deposition chamber produces and heats thin metal films under high vacuum. In order to measure curvature of the films as they are heated, the laser interferometer generates a topographical map of each film using a three-inch collimated beam of light and several optics components. The chamber and interferometer work in conjunction with one another, allowing for the films to be measured without breaking vacuum. Using the relationship between curvature and temperature, the stresses of the films can be calculated.